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Diffusion Barriers for Copper Metallization: Predicting Phase Stability and Reactivity using Equilibrium Thermodynamics
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- Journal:
- MRS Online Proceedings Library Archive / Volume 564 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 299
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- 1999
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Deposition of Ti(C,N) Thick Films by ILPCVD Starting from TDMAT
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- Journal:
- MRS Online Proceedings Library Archive / Volume 495 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 177
- Print publication:
- 1997
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Thermodynamic and Experimental Study of β-FeSi2 Lpcvd
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- Journal:
- MRS Online Proceedings Library Archive / Volume 320 / 1993
- Published online by Cambridge University Press:
- 03 September 2012, 91
- Print publication:
- 1993
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An Investigation of in Situ Chlorination of Tungsten
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- Journal:
- MRS Online Proceedings Library Archive / Volume 204 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 451
- Print publication:
- 1990
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